2/12/2010	12:01:03 PM	Bypass valve closed
2/12/2010	12:01:03 PM	Main Vac valve closed
2/12/2010	12:01:23 PM	Helium valve opened
2/12/2010	12:01:29 PM	Helium MFC set to  500.000000
2/12/2010	12:02:51 PM	Helium valve closed
2/12/2010	12:03:01 PM	Helium valve opened
2/12/2010	12:03:05 PM	Helium valve closed
2/12/2010	12:03:56 PM	BCl3 valve closed
2/12/2010	1:08:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2010	1:08:09 PM	Helium valve closed
2/12/2010	1:08:09 PM	H2 valve closed
2/12/2010	1:08:09 PM	BCl3 valve closed
2/12/2010	1:08:09 PM	PH3 valve closed
2/12/2010	1:08:09 PM	SiCl4 pre valve closed
2/12/2010	1:08:09 PM	SiCl4 post valve closed
2/12/2010	1:08:09 PM	Main Vac valve closed
2/12/2010	1:08:09 PM	Bubbler valve closed
2/12/2010	1:08:09 PM	Bypass valve opened
2/12/2010	1:08:09 PM	Helium MFC set to  0.000000
2/12/2010	1:08:09 PM	H2 MFC set to  0.000000
2/12/2010	1:08:09 PM	BCl3 MFC set to  0.000000
2/12/2010	1:08:09 PM	SiCl4 MFC set to  0.000000
2/12/2010	1:08:09 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	1:08:09 PM	Tube furnace set to 0
2/12/2010	1:08:09 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	1:08:30 PM	Helium valve closed
2/12/2010	1:08:30 PM	H2 valve closed
2/12/2010	1:08:30 PM	BCl3 valve closed
2/12/2010	1:08:30 PM	PH3 valve closed
2/12/2010	1:08:30 PM	SiCl4 pre valve closed
2/12/2010	1:08:30 PM	SiCl4 post valve closed
2/12/2010	1:08:30 PM	Bubbler valve closed
2/12/2010	1:08:30 PM	Main Vac valve opened
2/12/2010	1:08:30 PM	Bypass valve opened
2/12/2010	1:08:30 PM	Helium MFC set to  0.000000
2/12/2010	1:08:30 PM	H2 MFC set to  0.000000
2/12/2010	1:08:30 PM	BCl3 MFC set to  0.000000
2/12/2010	1:08:30 PM	SiCl4 MFC set to  0.000000
2/12/2010	1:08:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	1:08:30 PM	Tube furnace set to 0
2/12/2010	1:08:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	1:08:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2010	1:10:47 PM	BCl3 valve opened
2/12/2010	1:10:54 PM	BCl3 valve closed
2/12/2010	1:11:06 PM	BCl3 valve opened
2/12/2010	1:25:04 PM	Bypass valve closed
2/12/2010	1:25:04 PM	Main Vac valve closed
2/12/2010	1:25:19 PM	Bypass valve opened
2/12/2010	1:25:19 PM	Main Vac valve opened
2/12/2010	2:43:02 PM	Bypass valve closed
2/12/2010	2:43:02 PM	Main Vac valve closed
2/12/2010	2:43:27 PM	Bypass valve opened
2/12/2010	2:43:27 PM	Main Vac valve opened
2/12/2010	2:44:40 PM	BCl3 valve closed
2/12/2010	2:45:24 PM	Bypass valve closed
2/12/2010	2:45:24 PM	Main Vac valve closed
2/12/2010	2:45:57 PM	Bypass valve opened
2/12/2010	2:45:57 PM	Main Vac valve opened
2/12/2010	2:45:59 PM	BCl3 valve opened
2/12/2010	2:53:25 PM	Bypass valve closed
2/12/2010	2:53:25 PM	Main Vac valve closed
2/12/2010	2:53:55 PM	BCl3 valve closed
2/12/2010	2:54:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2010	2:54:52 PM	H2 valve closed
2/12/2010	2:54:52 PM	BCl3 valve closed
2/12/2010	2:54:52 PM	PH3 valve closed
2/12/2010	2:54:52 PM	SiCl4 pre valve closed
2/12/2010	2:54:52 PM	SiCl4 post valve closed
2/12/2010	2:54:52 PM	Main Vac valve closed
2/12/2010	2:54:52 PM	Bypass valve closed
2/12/2010	2:54:52 PM	Bubbler valve closed
2/12/2010	2:54:52 PM	Helium valve opened
2/12/2010	2:54:52 PM	Helium MFC set to  500.000000
2/12/2010	2:54:52 PM	H2 MFC set to  0.000000
2/12/2010	2:54:52 PM	BCl3 MFC set to  0.000000
2/12/2010	2:54:52 PM	SiCl4 MFC set to  0.000000
2/12/2010	2:54:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	2:54:52 PM	Tube furnace set to 0
2/12/2010	2:54:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	2:56:45 PM	Helium valve closed
2/12/2010	2:56:45 PM	H2 valve closed
2/12/2010	2:56:45 PM	BCl3 valve closed
2/12/2010	2:56:45 PM	PH3 valve closed
2/12/2010	2:56:45 PM	SiCl4 pre valve closed
2/12/2010	2:56:45 PM	SiCl4 post valve closed
2/12/2010	2:56:45 PM	Main Vac valve closed
2/12/2010	2:56:45 PM	Bypass valve closed
2/12/2010	2:56:45 PM	Bubbler valve closed
2/12/2010	2:56:45 PM	Helium MFC set to  0.000000
2/12/2010	2:56:45 PM	H2 MFC set to  0.000000
2/12/2010	2:56:45 PM	BCl3 MFC set to  0.000000
2/12/2010	2:56:45 PM	SiCl4 MFC set to  0.000000
2/12/2010	2:56:45 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	2:56:45 PM	Tube furnace set to 0
2/12/2010	2:56:45 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	2:56:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2010	3:00:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2010	3:00:35 PM	Helium valve closed
2/12/2010	3:00:35 PM	H2 valve closed
2/12/2010	3:00:35 PM	BCl3 valve closed
2/12/2010	3:00:35 PM	PH3 valve closed
2/12/2010	3:00:35 PM	SiCl4 pre valve closed
2/12/2010	3:00:35 PM	SiCl4 post valve closed
2/12/2010	3:00:35 PM	Main Vac valve closed
2/12/2010	3:00:35 PM	Bubbler valve closed
2/12/2010	3:00:35 PM	Bypass valve opened
2/12/2010	3:00:35 PM	Helium MFC set to  0.000000
2/12/2010	3:00:35 PM	H2 MFC set to  0.000000
2/12/2010	3:00:35 PM	BCl3 MFC set to  0.000000
2/12/2010	3:00:35 PM	SiCl4 MFC set to  0.000000
2/12/2010	3:00:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	3:00:35 PM	Tube furnace set to 0
2/12/2010	3:00:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	3:00:50 PM	Program started after a nonstandard shutdown
2/12/2010	3:00:50 PM	Helium valve closed
2/12/2010	3:00:50 PM	H2 valve closed
2/12/2010	3:00:50 PM	BCl3 valve closed
2/12/2010	3:00:50 PM	PH3 valve closed
2/12/2010	3:00:50 PM	SiCl4 pre valve closed
2/12/2010	3:00:50 PM	SiCl4 post valve closed
2/12/2010	3:00:50 PM	Main Vac valve closed
2/12/2010	3:00:50 PM	Bypass valve closed
2/12/2010	3:00:50 PM	Bubbler valve closed
2/12/2010	3:00:50 PM	Helium MFC set to  0.000000
2/12/2010	3:00:50 PM	H2 MFC set to  0.000000
2/12/2010	3:00:50 PM	BCl3 MFC set to  0.000000
2/12/2010	3:00:50 PM	SiCl4 MFC set to  0.000000
2/12/2010	3:00:50 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	3:00:50 PM	Tube furnace set to 0
2/12/2010	3:00:50 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	3:01:48 PM	Bypass valve opened
2/12/2010	3:01:49 PM	Bypass valve closed
2/12/2010	3:01:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2010	3:01:54 PM	Helium valve closed
2/12/2010	3:01:54 PM	H2 valve closed
2/12/2010	3:01:54 PM	BCl3 valve closed
2/12/2010	3:01:54 PM	PH3 valve closed
2/12/2010	3:01:54 PM	SiCl4 pre valve closed
2/12/2010	3:01:54 PM	SiCl4 post valve closed
2/12/2010	3:01:54 PM	Main Vac valve closed
2/12/2010	3:01:54 PM	Bubbler valve closed
2/12/2010	3:01:54 PM	Bypass valve opened
2/12/2010	3:01:54 PM	Helium MFC set to  0.000000
2/12/2010	3:01:54 PM	H2 MFC set to  0.000000
2/12/2010	3:01:54 PM	BCl3 MFC set to  0.000000
2/12/2010	3:01:54 PM	SiCl4 MFC set to  0.000000
2/12/2010	3:01:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	3:01:54 PM	Tube furnace set to 0
2/12/2010	3:01:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	3:02:23 PM	Helium valve closed
2/12/2010	3:02:23 PM	H2 valve closed
2/12/2010	3:02:23 PM	BCl3 valve closed
2/12/2010	3:02:23 PM	PH3 valve closed
2/12/2010	3:02:23 PM	SiCl4 pre valve closed
2/12/2010	3:02:23 PM	SiCl4 post valve closed
2/12/2010	3:02:23 PM	Bubbler valve closed
2/12/2010	3:02:23 PM	Main Vac valve opened
2/12/2010	3:02:23 PM	Bypass valve opened
2/12/2010	3:02:23 PM	Helium MFC set to  0.000000
2/12/2010	3:02:23 PM	H2 MFC set to  0.000000
2/12/2010	3:02:23 PM	BCl3 MFC set to  0.000000
2/12/2010	3:02:23 PM	SiCl4 MFC set to  0.000000
2/12/2010	3:02:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	3:02:23 PM	Tube furnace set to 0
2/12/2010	3:02:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	3:02:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2010	3:03:27 PM	Helium MFC set to  500.000000
2/12/2010	3:03:28 PM	Helium valve opened
2/12/2010	3:03:39 PM	Helium MFC set to  200.000000
2/12/2010	3:03:52 PM	Helium valve closed
2/12/2010	3:04:42 PM	Bypass valve closed
2/12/2010	3:04:43 PM	Main Vac valve closed
2/12/2010	3:04:53 PM	Bypass valve opened
2/12/2010	3:04:53 PM	Main Vac valve opened
2/12/2010	3:10:57 PM	Helium valve opened
2/12/2010	3:12:13 PM	Helium valve closed
2/12/2010	3:13:08 PM	Bypass valve closed
2/12/2010	3:13:09 PM	Main Vac valve closed
2/12/2010	3:13:36 PM	Bypass valve opened
2/12/2010	3:13:36 PM	Main Vac valve opened
2/12/2010	3:17:34 PM	Bypass valve closed
2/12/2010	3:17:35 PM	Main Vac valve closed
2/12/2010	3:17:54 PM	Main Vac valve opened
2/12/2010	3:17:55 PM	Bypass valve opened
2/12/2010	3:20:26 PM	BCl3 MFC set to  5.000000
2/12/2010	3:20:28 PM	BCl3 valve opened
2/12/2010	3:29:56 PM	Program started after a nonstandard shutdown
2/12/2010	3:29:56 PM	Helium valve closed
2/12/2010	3:29:56 PM	H2 valve closed
2/12/2010	3:29:56 PM	BCl3 valve closed
2/12/2010	3:29:56 PM	PH3 valve closed
2/12/2010	3:29:56 PM	SiCl4 pre valve closed
2/12/2010	3:29:56 PM	SiCl4 post valve closed
2/12/2010	3:29:56 PM	Main Vac valve closed
2/12/2010	3:29:56 PM	Bypass valve closed
2/12/2010	3:29:56 PM	Bubbler valve closed
2/12/2010	3:29:56 PM	Helium MFC set to  0.000000
2/12/2010	3:29:56 PM	H2 MFC set to  0.000000
2/12/2010	3:29:56 PM	BCl3 MFC set to  0.000000
2/12/2010	3:29:56 PM	SiCl4 MFC set to  0.000000
2/12/2010	3:29:56 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	3:29:56 PM	Tube furnace set to 0
2/12/2010	3:29:56 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	3:29:57 PM	Bypass valve opened
2/12/2010	3:29:58 PM	Main Vac valve opened
2/12/2010	3:30:04 PM	BCl3 valve opened
2/12/2010	3:30:09 PM	BCl3 MFC set to  5.000000
2/12/2010	3:30:23 PM	Program exited cleanly
2/12/2010	3:30:40 PM	Program started normally
2/12/2010	3:30:40 PM	Helium valve closed
2/12/2010	3:30:40 PM	H2 valve closed
2/12/2010	3:30:40 PM	BCl3 valve closed
2/12/2010	3:30:40 PM	PH3 valve closed
2/12/2010	3:30:40 PM	SiCl4 pre valve closed
2/12/2010	3:30:40 PM	SiCl4 post valve closed
2/12/2010	3:30:40 PM	Main Vac valve closed
2/12/2010	3:30:40 PM	Bypass valve closed
2/12/2010	3:30:40 PM	Bubbler valve closed
2/12/2010	3:30:40 PM	Helium MFC set to  0.000000
2/12/2010	3:30:41 PM	H2 MFC set to  0.000000
2/12/2010	3:30:41 PM	BCl3 MFC set to  0.000000
2/12/2010	3:30:41 PM	SiCl4 MFC set to  0.000000
2/12/2010	3:30:41 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	3:30:41 PM	Tube furnace set to 0
2/12/2010	3:30:41 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	3:30:42 PM	Bypass valve opened
2/12/2010	3:30:43 PM	Main Vac valve opened
2/12/2010	3:30:45 PM	BCl3 valve opened
2/12/2010	3:30:48 PM	BCl3 MFC set to  5.000000
2/12/2010	3:30:58 PM	Program exited cleanly
2/12/2010	3:31:19 PM	Program started normally
2/12/2010	3:31:19 PM	Helium valve closed
2/12/2010	3:31:19 PM	H2 valve closed
2/12/2010	3:31:19 PM	BCl3 valve closed
2/12/2010	3:31:19 PM	PH3 valve closed
2/12/2010	3:31:19 PM	SiCl4 pre valve closed
2/12/2010	3:31:19 PM	SiCl4 post valve closed
2/12/2010	3:31:19 PM	Main Vac valve closed
2/12/2010	3:31:19 PM	Bypass valve closed
2/12/2010	3:31:19 PM	Bubbler valve closed
2/12/2010	3:31:19 PM	Helium MFC set to  0.000000
2/12/2010	3:31:19 PM	H2 MFC set to  0.000000
2/12/2010	3:31:19 PM	BCl3 MFC set to  0.000000
2/12/2010	3:31:19 PM	SiCl4 MFC set to  0.000000
2/12/2010	3:31:19 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	3:31:19 PM	Tube furnace set to 0
2/12/2010	3:31:19 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	3:31:20 PM	Bypass valve opened
2/12/2010	3:31:21 PM	Main Vac valve opened
2/12/2010	3:31:22 PM	BCl3 valve opened
2/12/2010	3:31:24 PM	BCl3 MFC set to  5.000000
2/12/2010	3:32:01 PM	Bypass valve closed
2/12/2010	3:32:01 PM	Main Vac valve closed
2/12/2010	3:33:53 PM	Bypass valve opened
2/12/2010	3:33:53 PM	Main Vac valve opened
2/12/2010	3:48:25 PM	BCl3 valve closed
2/12/2010	3:55:09 PM	BCl3 MFC set to  0.000000
2/12/2010	4:10:35 PM	H2 valve opened
2/12/2010	4:10:41 PM	H2 MFC set to  500.000000
2/12/2010	4:22:02 PM	BCl3 valve opened
2/12/2010	4:22:17 PM	BCl3 MFC set to  5.000000
2/12/2010	4:22:39 PM	BCl3 valve closed
2/12/2010	4:22:51 PM	BCl3 valve opened
2/12/2010	4:23:14 PM	BCl3 valve closed
2/12/2010	4:23:31 PM	BCl3 valve opened
2/12/2010	4:24:12 PM	BCl3 valve closed
2/12/2010	4:25:15 PM	BCl3 valve opened
2/12/2010	4:26:21 PM	Program exited cleanly
2/12/2010	4:27:36 PM	Program started normally
2/12/2010	4:27:36 PM	Helium valve closed
2/12/2010	4:27:36 PM	H2 valve closed
2/12/2010	4:27:36 PM	BCl3 valve closed
2/12/2010	4:27:36 PM	PH3 valve closed
2/12/2010	4:27:36 PM	SiCl4 pre valve closed
2/12/2010	4:27:36 PM	SiCl4 post valve closed
2/12/2010	4:27:36 PM	Main Vac valve closed
2/12/2010	4:27:36 PM	Bypass valve closed
2/12/2010	4:27:36 PM	Bubbler valve closed
2/12/2010	4:27:36 PM	Helium MFC set to  0.000000
2/12/2010	4:27:36 PM	H2 MFC set to  0.000000
2/12/2010	4:27:36 PM	BCl3 MFC set to  0.000000
2/12/2010	4:27:36 PM	SiCl4 MFC set to  0.000000
2/12/2010	4:27:36 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	4:27:36 PM	Tube furnace set to 0
2/12/2010	4:27:36 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	4:27:37 PM	Bypass valve opened
2/12/2010	4:27:38 PM	Main Vac valve opened
2/12/2010	4:27:41 PM	H2 valve opened
2/12/2010	4:27:42 PM	BCl3 valve opened
2/12/2010	4:27:45 PM	H2 MFC set to  500.000000
2/12/2010	4:27:49 PM	BCl3 MFC set to  100.000000
2/12/2010	5:06:08 PM	BCl3 valve closed
2/12/2010	5:17:33 PM	H2 valve closed
2/12/2010	5:19:37 PM	Bypass valve closed
2/12/2010	5:19:37 PM	Main Vac valve closed
2/12/2010	5:19:58 PM	Bypass valve opened
2/12/2010	5:19:59 PM	Main Vac valve opened
2/12/2010	5:21:13 PM	Program started after a nonstandard shutdown
2/12/2010	5:21:13 PM	Helium valve closed
2/12/2010	5:21:13 PM	H2 valve closed
2/12/2010	5:21:13 PM	BCl3 valve closed
2/12/2010	5:21:13 PM	PH3 valve closed
2/12/2010	5:21:13 PM	SiCl4 pre valve closed
2/12/2010	5:21:13 PM	SiCl4 post valve closed
2/12/2010	5:21:13 PM	Main Vac valve closed
2/12/2010	5:21:13 PM	Bypass valve closed
2/12/2010	5:21:13 PM	Bubbler valve closed
2/12/2010	5:21:13 PM	Helium MFC set to  0.000000
2/12/2010	5:21:13 PM	H2 MFC set to  0.000000
2/12/2010	5:21:13 PM	BCl3 MFC set to  0.000000
2/12/2010	5:21:13 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:21:13 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	5:21:13 PM	Tube furnace set to 0
2/12/2010	5:21:13 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	5:21:14 PM	Bypass valve opened
2/12/2010	5:21:14 PM	Main Vac valve opened
2/12/2010	5:27:25 PM	Program exited cleanly
2/12/2010	5:27:30 PM	Program started normally
2/12/2010	5:27:30 PM	Helium valve closed
2/12/2010	5:27:30 PM	H2 valve closed
2/12/2010	5:27:30 PM	BCl3 valve closed
2/12/2010	5:27:30 PM	PH3 valve closed
2/12/2010	5:27:30 PM	SiCl4 pre valve closed
2/12/2010	5:27:30 PM	SiCl4 post valve closed
2/12/2010	5:27:30 PM	Main Vac valve closed
2/12/2010	5:27:30 PM	Bypass valve closed
2/12/2010	5:27:30 PM	Bubbler valve closed
2/12/2010	5:27:30 PM	Helium MFC set to  0.000000
2/12/2010	5:27:30 PM	H2 MFC set to  0.000000
2/12/2010	5:27:30 PM	BCl3 MFC set to  0.000000
2/12/2010	5:27:30 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:27:30 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	5:27:30 PM	Tube furnace set to 0
2/12/2010	5:27:30 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	5:27:36 PM	Bypass valve opened
2/12/2010	5:27:37 PM	Main Vac valve opened
2/12/2010	5:28:19 PM	Bypass valve closed
2/12/2010	5:28:20 PM	Main Vac valve closed
2/12/2010	5:28:28 PM	Bypass valve opened
2/12/2010	5:28:29 PM	Main Vac valve opened
2/12/2010	5:30:11 PM	Program exited cleanly
2/12/2010	5:30:13 PM	Program started normally
2/12/2010	5:30:13 PM	Helium valve closed
2/12/2010	5:30:13 PM	H2 valve closed
2/12/2010	5:30:13 PM	BCl3 valve closed
2/12/2010	5:30:13 PM	PH3 valve closed
2/12/2010	5:30:13 PM	SiCl4 pre valve closed
2/12/2010	5:30:13 PM	SiCl4 post valve closed
2/12/2010	5:30:13 PM	Main Vac valve closed
2/12/2010	5:30:13 PM	Bypass valve closed
2/12/2010	5:30:13 PM	Bubbler valve closed
2/12/2010	5:30:13 PM	Helium MFC set to  0.000000
2/12/2010	5:30:13 PM	H2 MFC set to  0.000000
2/12/2010	5:30:13 PM	BCl3 MFC set to  0.000000
2/12/2010	5:30:13 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:30:13 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	5:30:13 PM	Tube furnace set to 0
2/12/2010	5:30:13 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	5:30:15 PM	Bypass valve opened
2/12/2010	5:30:16 PM	Bypass valve closed
2/12/2010	5:30:29 PM	Recipe started at 5:30 PM
2/12/2010	5:30:29 PM	H2 valve closed
2/12/2010	5:30:29 PM	BCl3 valve closed
2/12/2010	5:30:29 PM	PH3 valve closed
2/12/2010	5:30:29 PM	SiCl4 pre valve closed
2/12/2010	5:30:29 PM	SiCl4 post valve closed
2/12/2010	5:30:29 PM	Bubbler valve closed
2/12/2010	5:30:29 PM	Helium valve opened
2/12/2010	5:30:29 PM	Main Vac valve opened
2/12/2010	5:30:30 PM	Bypass valve opened
2/12/2010	5:30:30 PM	Helium MFC set to  100.000000
2/12/2010	5:30:30 PM	H2 MFC set to  0.000000
2/12/2010	5:30:30 PM	BCl3 MFC set to  0.000000
2/12/2010	5:30:30 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:30:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:30:30 PM	Tube furnace set to 0
2/12/2010	5:30:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:30:35 PM	Helium valve closed
2/12/2010	5:30:35 PM	BCl3 valve closed
2/12/2010	5:30:35 PM	PH3 valve closed
2/12/2010	5:30:35 PM	SiCl4 pre valve closed
2/12/2010	5:30:35 PM	SiCl4 post valve closed
2/12/2010	5:30:35 PM	Bubbler valve closed
2/12/2010	5:30:35 PM	H2 valve opened
2/12/2010	5:30:35 PM	Main Vac valve opened
2/12/2010	5:30:35 PM	Bypass valve opened
2/12/2010	5:30:35 PM	Helium MFC set to  100.000000
2/12/2010	5:30:35 PM	H2 MFC set to  200.000000
2/12/2010	5:30:35 PM	BCl3 MFC set to  0.000000
2/12/2010	5:30:35 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:30:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:30:35 PM	Tube furnace set to 0
2/12/2010	5:30:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:30:40 PM	Run finished at 5:30 PM
2/12/2010	5:30:46 PM	H2 valve closed
2/12/2010	5:34:35 PM	SiCl4 pre valve opened
2/12/2010	5:34:36 PM	SiCl4 pre valve closed
2/12/2010	5:34:38 PM	SiCl4 pre valve opened
2/12/2010	5:34:38 PM	SiCl4 pre valve closed
2/12/2010	5:34:54 PM	SiCl4 MFC set to  325.000000
2/12/2010	5:35:12 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:35:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2010	5:35:40 PM	H2 valve closed
2/12/2010	5:35:40 PM	BCl3 valve closed
2/12/2010	5:35:40 PM	PH3 valve closed
2/12/2010	5:35:40 PM	SiCl4 pre valve closed
2/12/2010	5:35:40 PM	SiCl4 post valve closed
2/12/2010	5:35:40 PM	Main Vac valve closed
2/12/2010	5:35:40 PM	Bypass valve closed
2/12/2010	5:35:40 PM	Bubbler valve closed
2/12/2010	5:35:40 PM	Helium valve opened
2/12/2010	5:35:40 PM	Helium MFC set to  500.000000
2/12/2010	5:35:40 PM	H2 MFC set to  0.000000
2/12/2010	5:35:40 PM	BCl3 MFC set to  0.000000
2/12/2010	5:35:40 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:35:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:35:40 PM	Tube furnace set to 0
2/12/2010	5:35:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:37:02 PM	Helium valve closed
2/12/2010	5:37:02 PM	H2 valve closed
2/12/2010	5:37:02 PM	BCl3 valve closed
2/12/2010	5:37:02 PM	PH3 valve closed
2/12/2010	5:37:02 PM	SiCl4 pre valve closed
2/12/2010	5:37:02 PM	SiCl4 post valve closed
2/12/2010	5:37:02 PM	Main Vac valve closed
2/12/2010	5:37:02 PM	Bypass valve closed
2/12/2010	5:37:02 PM	Bubbler valve closed
2/12/2010	5:37:02 PM	Helium MFC set to  0.000000
2/12/2010	5:37:02 PM	H2 MFC set to  0.000000
2/12/2010	5:37:02 PM	BCl3 MFC set to  0.000000
2/12/2010	5:37:02 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:37:02 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:37:02 PM	Tube furnace set to 0
2/12/2010	5:37:02 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:37:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2010	5:38:07 PM	SiCl4 post valve opened
2/12/2010	5:38:07 PM	SiCl4 post valve closed
2/12/2010	5:38:10 PM	SiCl4 post valve opened
2/12/2010	5:38:11 PM	SiCl4 post valve closed
2/12/2010	5:38:52 PM	SiCl4 pre valve opened
2/12/2010	5:38:52 PM	SiCl4 pre valve closed
2/12/2010	5:38:53 PM	SiCl4 pre valve opened
2/12/2010	5:38:53 PM	SiCl4 pre valve closed
2/12/2010	5:43:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2010	5:43:23 PM	Helium valve closed
2/12/2010	5:43:23 PM	H2 valve closed
2/12/2010	5:43:23 PM	BCl3 valve closed
2/12/2010	5:43:23 PM	PH3 valve closed
2/12/2010	5:43:23 PM	SiCl4 pre valve closed
2/12/2010	5:43:23 PM	SiCl4 post valve closed
2/12/2010	5:43:23 PM	Main Vac valve closed
2/12/2010	5:43:23 PM	Bubbler valve closed
2/12/2010	5:43:23 PM	Bypass valve opened
2/12/2010	5:43:23 PM	Helium MFC set to  0.000000
2/12/2010	5:43:23 PM	H2 MFC set to  0.000000
2/12/2010	5:43:23 PM	BCl3 MFC set to  0.000000
2/12/2010	5:43:23 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:43:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:43:23 PM	Tube furnace set to 0
2/12/2010	5:43:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:43:51 PM	Helium valve closed
2/12/2010	5:43:51 PM	H2 valve closed
2/12/2010	5:43:51 PM	BCl3 valve closed
2/12/2010	5:43:51 PM	PH3 valve closed
2/12/2010	5:43:51 PM	SiCl4 pre valve closed
2/12/2010	5:43:51 PM	SiCl4 post valve closed
2/12/2010	5:43:51 PM	Bubbler valve closed
2/12/2010	5:43:51 PM	Main Vac valve opened
2/12/2010	5:43:51 PM	Bypass valve opened
2/12/2010	5:43:51 PM	Helium MFC set to  0.000000
2/12/2010	5:43:51 PM	H2 MFC set to  0.000000
2/12/2010	5:43:51 PM	BCl3 MFC set to  0.000000
2/12/2010	5:43:51 PM	SiCl4 MFC set to  0.000000
2/12/2010	5:43:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:43:51 PM	Tube furnace set to 0
2/12/2010	5:43:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	5:43:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2010	5:45:08 PM	Helium MFC set to  100.000000
2/12/2010	5:45:10 PM	Helium valve opened
2/12/2010	5:48:06 PM	Helium valve closed
2/12/2010	5:50:11 PM	Bypass valve closed
2/12/2010	5:50:12 PM	Main Vac valve closed
2/12/2010	5:50:29 PM	Bypass valve opened
2/12/2010	5:50:30 PM	Main Vac valve opened
2/12/2010	5:50:32 PM	Helium valve opened
2/12/2010	5:55:07 PM	Helium valve closed
2/12/2010	5:55:32 PM	Helium MFC set to  0.000000
2/12/2010	6:06:24 PM	Bypass valve closed
2/12/2010	6:06:24 PM	Main Vac valve closed
2/12/2010	6:08:22 PM	Bypass valve opened
2/12/2010	6:08:23 PM	Main Vac valve opened
2/12/2010	6:15:43 PM	Program exited cleanly
2/12/2010	6:15:46 PM	Program started normally
2/12/2010	6:15:46 PM	Helium valve closed
2/12/2010	6:15:46 PM	H2 valve closed
2/12/2010	6:15:46 PM	BCl3 valve closed
2/12/2010	6:15:46 PM	PH3 valve closed
2/12/2010	6:15:46 PM	SiCl4 pre valve closed
2/12/2010	6:15:46 PM	SiCl4 post valve closed
2/12/2010	6:15:46 PM	Main Vac valve closed
2/12/2010	6:15:46 PM	Bypass valve closed
2/12/2010	6:15:46 PM	Bubbler valve closed
2/12/2010	6:15:46 PM	Helium MFC set to  0.000000
2/12/2010	6:15:46 PM	H2 MFC set to  0.000000
2/12/2010	6:15:46 PM	BCl3 MFC set to  0.000000
2/12/2010	6:15:46 PM	SiCl4 MFC set to  0.000000
2/12/2010	6:15:46 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	6:15:46 PM	Tube furnace set to 0
2/12/2010	6:15:46 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	6:15:47 PM	Bypass valve opened
2/12/2010	6:15:48 PM	Main Vac valve opened
2/12/2010	6:24:58 PM	Recipe started at 6:24 PM
2/12/2010	6:24:58 PM	Helium valve closed
2/12/2010	6:24:58 PM	BCl3 valve closed
2/12/2010	6:24:58 PM	PH3 valve closed
2/12/2010	6:24:58 PM	SiCl4 pre valve closed
2/12/2010	6:24:58 PM	SiCl4 post valve closed
2/12/2010	6:24:58 PM	Main Vac valve closed
2/12/2010	6:24:58 PM	Bypass valve closed
2/12/2010	6:24:58 PM	Bubbler valve closed
2/12/2010	6:24:58 PM	H2 valve opened
2/12/2010	6:24:58 PM	Helium MFC set to  0.000000
2/12/2010	6:24:58 PM	H2 MFC set to  500.000000
2/12/2010	6:24:58 PM	BCl3 MFC set to  0.000000
2/12/2010	6:24:58 PM	SiCl4 MFC set to  0.000000
2/12/2010	6:24:58 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	6:24:58 PM	Tube furnace set to 0
2/12/2010	6:24:58 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	6:26:09 PM	Helium valve closed
2/12/2010	6:26:09 PM	BCl3 valve closed
2/12/2010	6:26:09 PM	PH3 valve closed
2/12/2010	6:26:09 PM	SiCl4 pre valve closed
2/12/2010	6:26:09 PM	SiCl4 post valve closed
2/12/2010	6:26:09 PM	Main Vac valve closed
2/12/2010	6:26:09 PM	Bypass valve closed
2/12/2010	6:26:09 PM	H2 valve opened
2/12/2010	6:26:09 PM	Bubbler valve opened
2/12/2010	6:26:09 PM	Helium MFC set to  0.000000
2/12/2010	6:26:09 PM	H2 MFC set to  500.000000
2/12/2010	6:26:09 PM	BCl3 MFC set to  0.000000
2/12/2010	6:26:09 PM	SiCl4 MFC set to  0.000000
2/12/2010	6:26:09 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	6:26:09 PM	Tube furnace set to 0
2/12/2010	6:26:09 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	6:46:10 PM	Helium valve closed
2/12/2010	6:46:10 PM	BCl3 valve closed
2/12/2010	6:46:10 PM	PH3 valve closed
2/12/2010	6:46:10 PM	Main Vac valve closed
2/12/2010	6:46:10 PM	Bypass valve closed
2/12/2010	6:46:10 PM	H2 valve opened
2/12/2010	6:46:10 PM	SiCl4 pre valve opened
2/12/2010	6:46:10 PM	SiCl4 post valve opened
2/12/2010	6:46:10 PM	Bubbler valve opened
2/12/2010	6:46:10 PM	Helium MFC set to  0.000000
2/12/2010	6:46:10 PM	H2 MFC set to  500.000000
2/12/2010	6:46:10 PM	BCl3 MFC set to  0.000000
2/12/2010	6:46:10 PM	SiCl4 MFC set to  325.000000
2/12/2010	6:46:10 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	6:46:10 PM	Tube furnace set to 0
2/12/2010	6:46:10 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:06:10 PM	H2 valve closed
2/12/2010	7:06:10 PM	BCl3 valve closed
2/12/2010	7:06:10 PM	PH3 valve closed
2/12/2010	7:06:10 PM	SiCl4 pre valve closed
2/12/2010	7:06:10 PM	SiCl4 post valve closed
2/12/2010	7:06:10 PM	Main Vac valve closed
2/12/2010	7:06:10 PM	Bypass valve closed
2/12/2010	7:06:10 PM	Helium valve opened
2/12/2010	7:06:10 PM	Bubbler valve opened
2/12/2010	7:06:10 PM	Helium MFC set to  500.000000
2/12/2010	7:06:10 PM	H2 MFC set to  0.000000
2/12/2010	7:06:10 PM	BCl3 MFC set to  0.000000
2/12/2010	7:06:10 PM	SiCl4 MFC set to  0.000000
2/12/2010	7:06:10 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:06:10 PM	Tube furnace set to 0
2/12/2010	7:06:10 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:26:10 PM	Run finished at 7:26 PM
2/12/2010	7:30:43 PM	BCl3 valve opened
2/12/2010	7:30:43 PM	BCl3 valve closed
2/12/2010	7:30:46 PM	BCl3 valve opened
2/12/2010	7:30:49 PM	BCl3 valve closed
2/12/2010	7:30:52 PM	BCl3 valve opened
2/12/2010	7:30:55 PM	BCl3 valve closed
2/12/2010	7:30:58 PM	BCl3 valve opened
2/12/2010	7:30:59 PM	BCl3 valve closed
2/12/2010	7:32:43 PM	Bubbler valve closed
2/12/2010	7:32:44 PM	Helium valve closed
2/12/2010	7:32:47 PM	Helium MFC set to  0.000000
2/12/2010	7:35:43 PM	Program exited cleanly
2/12/2010	7:36:11 PM	Program started normally
2/12/2010	7:36:11 PM	Helium valve closed
2/12/2010	7:36:11 PM	H2 valve closed
2/12/2010	7:36:11 PM	BCl3 valve closed
2/12/2010	7:36:11 PM	PH3 valve closed
2/12/2010	7:36:11 PM	SiCl4 pre valve closed
2/12/2010	7:36:11 PM	SiCl4 post valve closed
2/12/2010	7:36:11 PM	Main Vac valve closed
2/12/2010	7:36:11 PM	Bypass valve closed
2/12/2010	7:36:11 PM	Bubbler valve closed
2/12/2010	7:36:11 PM	Helium MFC set to  0.000000
2/12/2010	7:36:11 PM	H2 MFC set to  0.000000
2/12/2010	7:36:11 PM	BCl3 MFC set to  0.000000
2/12/2010	7:36:11 PM	SiCl4 MFC set to  0.000000
2/12/2010	7:36:11 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	7:36:11 PM	Tube furnace set to 0
2/12/2010	7:36:11 PM	Bypass solenoid MFC set to  760.000000
2/12/2010	7:36:24 PM	Helium valve opened
2/12/2010	7:36:25 PM	Helium valve closed
2/12/2010	7:36:30 PM	Helium MFC set to  500.000000
2/12/2010	7:36:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2010	7:36:44 PM	H2 valve closed
2/12/2010	7:36:44 PM	BCl3 valve closed
2/12/2010	7:36:44 PM	PH3 valve closed
2/12/2010	7:36:44 PM	SiCl4 pre valve closed
2/12/2010	7:36:44 PM	SiCl4 post valve closed
2/12/2010	7:36:44 PM	Main Vac valve closed
2/12/2010	7:36:44 PM	Bypass valve closed
2/12/2010	7:36:44 PM	Bubbler valve closed
2/12/2010	7:36:44 PM	Helium valve opened
2/12/2010	7:36:44 PM	Helium MFC set to  500.000000
2/12/2010	7:36:44 PM	H2 MFC set to  0.000000
2/12/2010	7:36:44 PM	BCl3 MFC set to  0.000000
2/12/2010	7:36:44 PM	SiCl4 MFC set to  0.000000
2/12/2010	7:36:44 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:36:44 PM	Tube furnace set to 0
2/12/2010	7:36:44 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:36:44 PM	Helium valve closed
2/12/2010	7:36:44 PM	H2 valve closed
2/12/2010	7:36:44 PM	BCl3 valve closed
2/12/2010	7:36:44 PM	PH3 valve closed
2/12/2010	7:36:44 PM	SiCl4 pre valve closed
2/12/2010	7:36:44 PM	SiCl4 post valve closed
2/12/2010	7:36:44 PM	Main Vac valve closed
2/12/2010	7:36:44 PM	Bypass valve closed
2/12/2010	7:36:44 PM	Bubbler valve closed
2/12/2010	7:36:44 PM	Helium MFC set to  0.000000
2/12/2010	7:36:44 PM	H2 MFC set to  0.000000
2/12/2010	7:36:44 PM	BCl3 MFC set to  0.000000
2/12/2010	7:36:44 PM	SiCl4 MFC set to  0.000000
2/12/2010	7:36:44 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:36:44 PM	Tube furnace set to 0
2/12/2010	7:36:44 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:36:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2010	7:37:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2010	7:37:12 PM	Helium valve closed
2/12/2010	7:37:12 PM	H2 valve closed
2/12/2010	7:37:12 PM	BCl3 valve closed
2/12/2010	7:37:12 PM	PH3 valve closed
2/12/2010	7:37:12 PM	SiCl4 pre valve closed
2/12/2010	7:37:12 PM	SiCl4 post valve closed
2/12/2010	7:37:12 PM	Main Vac valve closed
2/12/2010	7:37:12 PM	Bubbler valve closed
2/12/2010	7:37:12 PM	Bypass valve opened
2/12/2010	7:37:12 PM	Helium MFC set to  0.000000
2/12/2010	7:37:12 PM	H2 MFC set to  0.000000
2/12/2010	7:37:12 PM	BCl3 MFC set to  0.000000
2/12/2010	7:37:12 PM	SiCl4 MFC set to  0.000000
2/12/2010	7:37:12 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:37:12 PM	Tube furnace set to 0
2/12/2010	7:37:12 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:37:33 PM	Helium valve closed
2/12/2010	7:37:33 PM	H2 valve closed
2/12/2010	7:37:33 PM	BCl3 valve closed
2/12/2010	7:37:33 PM	PH3 valve closed
2/12/2010	7:37:33 PM	SiCl4 pre valve closed
2/12/2010	7:37:33 PM	SiCl4 post valve closed
2/12/2010	7:37:33 PM	Bubbler valve closed
2/12/2010	7:37:33 PM	Main Vac valve opened
2/12/2010	7:37:33 PM	Bypass valve opened
2/12/2010	7:37:33 PM	Helium MFC set to  0.000000
2/12/2010	7:37:33 PM	H2 MFC set to  0.000000
2/12/2010	7:37:33 PM	BCl3 MFC set to  0.000000
2/12/2010	7:37:33 PM	SiCl4 MFC set to  0.000000
2/12/2010	7:37:33 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:37:33 PM	Tube furnace set to 0
2/12/2010	7:37:33 PM	Bypass solenoid MFC set to  0.000000
2/12/2010	7:37:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
